Chapter 29: Fabrication of Microelectromechanical Devices and Systems (MEMS)¶
第二十九章：微机电系统 (MEMS) 制造
29.1 Introduction (引言)¶
- Microsensors (微传感器)
- Microactuators (微致动器)
29.2 Micromachining (微加工)¶
- Bulk micromachining (体微加工)
- Surface micromachining (表面微加工)
29.3 LIGA and Related Processes (LIGA及相关工艺)¶
- Lithographie, Galvanoformung, Abformung (光刻、电铸、模造)
29.4 Solid Freeform Fabrication (实体自由成形)¶
29.5 Micro-manufacturing (微制造)¶
- Micro-molding (微模塑)
- Micro-forging (微锻造)